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Abstract:
介绍了一种具有新型耐压层结构的IGBT--低功耗IGBT.新结构用三重扩散的方法在n-单晶片上引入了n+缓冲层.保留了NPT-IGBT中薄而轻掺杂的背p+层和高载流子寿命的本质优点,同时又具有PT-IGBT中n-/n+双层复合的薄耐压层(即薄基区)的优点.计算机仿真得出,新结构IGBT的关断损耗比传统的IGBT减小50%左右.针对LPL-IGBT的创新点--新耐压层结构,我们还进行了优化仿真.
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半导体技术
ISSN: 1003-353X
Year: 2003
Issue: 7
Volume: 28
Page: 64-68
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count: 9
Chinese Cited Count:
30 Days PV: 0
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