This　paper　presented　the　principle　and　method　of　chemical　vapor　depositing　molybdenum.　Molybdenum　coatings　were　deposited　on　copper　substrates　from　the　mixture　of　MoF6　and　H-2.　The　microstructures　and　microhardness　of　the　deposits　were　analyzed.　The　results　show　that　the　microstructures　changes　with　the　variation　of　deposition　temperature.　The　microstructures　of　deposited　layer　presents　a　fine　grains　multilayer　structure　with　a　microhardness　up　to　677x9.8　MPa　at　a　relatively　low　deposition　temperature,　while　a　compact　columnar　crystals　microstructure　at　a　higher　deposition　temperature.