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Author:

陈光华 (陈光华.) | 张阳 (张阳.) | 朱鹤孙 (朱鹤孙.) | 杨宁 (杨宁.)

Indexed by:

PKU CSCD

Abstract:

用电子回旋共振等离子体化学汽相沉积 (ECRCVD)法 ,在单晶硅 (10 0 )衬底上沉积生长出了具有 { 2 2 1}结构特性的连续的结晶态 β C3N4 薄膜。使用扫描电镜 (SEM)观测了沉积薄膜的形态 ;采用X射线光电子光谱 (XPS) ,X射线衍射 (XRD)和拉曼散射表征薄膜的结构。研究表明 ,沉积结晶态 β C3N4 薄膜具有 { 2 2 1}结构特性。

Keyword:

电子回旋共振等离子体 薄膜结构 化学汽相沉积 β-C_3N_4薄膜

Author Community:

  • [ 1 ] 北京工业大学
  • [ 2 ] 材料科学与工程学院 北京100022

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Source :

人工晶体学报

Year: 2000

Issue: 03

Page: 224-228

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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