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Author:

Zhang, Jintao (Zhang, Jintao.) | Cui, Jing (Cui, Jing.) (Scholars:崔晶) | Lu, Yuanshen (Lu, Yuanshen.) | Zhang, Xu (Zhang, Xu.) | Hu, Xiaohui (Hu, Xiaohui.)

Indexed by:

CPCI-S EI Scopus

Abstract:

A flexible capacitive tactile sensor with micro needle structure is designed in this paper for the palm and fingers of the manipulator. The sensor has better sensitivity, stability and repeatability and the spatial layout of the manipulator tactile sensor is designed in this paper. The main raw material PDMS is prepared to meet the requirements of a flexible tactile sensor. The silicon-based MEMS technology is used to achieve a tiny micro needle structure. Experimental results show that the sensor is proved to work well and able to guarantee a better sensitivity at 30 N pressure.

Keyword:

Micro needle Silicon-based MEMS technology Flexible tactile sensor

Author Community:

  • [ 1 ] [Zhang, Jintao]Beijing Univ Technol, Beijing, Peoples R China
  • [ 2 ] [Cui, Jing]Beijing Univ Technol, Beijing, Peoples R China
  • [ 3 ] [Lu, Yuanshen]Beijing Univ Technol, Beijing, Peoples R China
  • [ 4 ] [Zhang, Xu]Acad Sci, Inst Semicond, Beijing, Peoples R China
  • [ 5 ] [Hu, Xiaohui]Acad Sci, Inst Semicond, Beijing, Peoples R China

Reprint Author's Address:

  • [Zhang, Xu]Acad Sci, Inst Semicond, Beijing, Peoples R China

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Source :

COGNITIVE SYSTEMS AND SIGNAL PROCESSING, ICCSIP 2016

ISSN: 1865-0929

Year: 2017

Volume: 710

Page: 303-309

Language: English

Cited Count:

WoS CC Cited Count: 1

SCOPUS Cited Count: 2

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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