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Abstract:
用热丝辅助化学汽相沉积技术在Si衬底上合成了含少量受主型杂质的近于本征的金刚石薄膜,并研究了三种金属(Cu,Ag和Al)与它接触的电学特性,以及退火对接触特性的影响.结果表明Cu,Ag与金刚石薄膜接触的电学特性比较类似,而Al则明显不同;而且退火对它们的接触特性影响很大
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Source :
物理学报
Year: 1997
Issue: 06
Page: 149-153
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 0