• Complex
  • Title
  • Keyword
  • Abstract
  • Scholars
  • Journal
  • ISSN
  • Conference
搜索

Author:

周学文 (周学文.)

Abstract:

本文研究了国产7205聚脂胶分辨率与胶膜厚度的关系。初步实验证明对于国产7205聚脂胶,分辨率是膜厚的5~6倍。同时研究了针孔与膜厚的关系。实验结果表明针孔数目与膜厚关系很大,薄胶膜针孔数可高至2000以上,而厚胶膜针孔降至20以下。最后综合了分辨率与膜厚的矛盾,选用膜厚为1700(?),在3DA50(3GC5W)微波功率管的矩阵版(最小条宽1μ)上进行了验证试验,获得良好的结果。

Keyword:

微波功率管 分辨率 光刻工艺

Author Community:

  • [ 1 ] 北京工业大学半导体器件专业 学员

Reprint Author's Address:

Email:

Show more details

Related Keywords:

Source :

北京工业大学学报

Year: 1974

Issue: 02

Page: 67-74

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

Affiliated Colleges:

Online/Total:648/5319405
Address:BJUT Library(100 Pingleyuan,Chaoyang District,Beijing 100124, China Post Code:100124) Contact Us:010-67392185
Copyright:BJUT Library Technical Support:Beijing Aegean Software Co., Ltd.