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Author:

卢岳 (卢岳.) (Scholars:卢岳) | 隋曼龄 (隋曼龄.) (Scholars:隋曼龄)

Abstract:

  随着电子工业的不断发展,半导体器件越来越趋向于微型化。如何实现纳米尺度加工半导体器件,成为目前工业界以及科学研究领域的热点与难点。对于传统半导体光刻蚀与印刷技术,由于受到光的波长限制,其加工极限尺寸往往在百纳米量级。

Keyword:

氧化物 电子束刻蚀印刷

Author Community:

  • [ 1 ] [卢岳]北京工业大学固体微结构与性能研究所

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Source :

Year: 2016

Page: 1-1

Language: Chinese

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count: -1

Chinese Cited Count:

30 Days PV: 0

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