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Author:

Yu Nai-gong (Yu Nai-gong.) (Scholars:于乃功) | Xu Qiao (Xu Qiao.) | Wang Hong-lu (Wang Hong-lu.) | Lin Jia (Lin Jia.)

Indexed by:

EI Scopus SCIE CSCD

Abstract:

Wafer bin map (WBM) inspection is a critical approach for evaluating the semiconductor manufacturing process. An excellent inspection algorithm can improve the production efficiency and yield. This paper proposes a WBM defect pattern inspection strategy based on the DenseNet deep learning model, the structure and training loss function are improved according to the characteristics of the WBM. In addition, a constrained mean filtering algorithm is proposed to filter the noise grains. In model prediction, an entropy-based Monte Carlo dropout algorithm is employed to quantify the uncertainty of the model decision. The experimental results show that the recognition ability of the improved DenseNet is better than that of traditional algorithms in terms of typical WBM defect patterns. Analyzing the model uncertainty can not only effectively reduce the miss or false detection rate but also help to identify new patterns.

Keyword:

DenseNet convolutional neural network model uncertainty wafer defect inspection

Author Community:

  • [ 1 ] [Yu Nai-gong]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Xu Qiao]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Wang Hong-lu]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Lin Jia]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 5 ] [Yu Nai-gong]Beijing Key Lab Comp Intelligence & Intelligent S, Beijing 100124, Peoples R China
  • [ 6 ] [Xu Qiao]Beijing Key Lab Comp Intelligence & Intelligent S, Beijing 100124, Peoples R China
  • [ 7 ] [Wang Hong-lu]Beijing Key Lab Comp Intelligence & Intelligent S, Beijing 100124, Peoples R China
  • [ 8 ] [Lin Jia]Beijing Key Lab Comp Intelligence & Intelligent S, Beijing 100124, Peoples R China
  • [ 9 ] [Yu Nai-gong]Minist Educ, Engn Res Ctr Digital Community, Beijing 100124, Peoples R China
  • [ 10 ] [Xu Qiao]Minist Educ, Engn Res Ctr Digital Community, Beijing 100124, Peoples R China
  • [ 11 ] [Wang Hong-lu]Minist Educ, Engn Res Ctr Digital Community, Beijing 100124, Peoples R China
  • [ 12 ] [Lin Jia]Minist Educ, Engn Res Ctr Digital Community, Beijing 100124, Peoples R China

Reprint Author's Address:

  • 于乃功

    [Yu Nai-gong]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China;;[Yu Nai-gong]Beijing Key Lab Comp Intelligence & Intelligent S, Beijing 100124, Peoples R China;;[Yu Nai-gong]Minist Educ, Engn Res Ctr Digital Community, Beijing 100124, Peoples R China

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Source :

JOURNAL OF CENTRAL SOUTH UNIVERSITY

ISSN: 2095-2899

Year: 2021

Issue: 8

Volume: 28

Page: 2436-2450

4 . 4 0 0

JCR@2022

ESI Discipline: MATERIALS SCIENCE;

ESI HC Threshold:116

JCR Journal Grade:2

Cited Count:

WoS CC Cited Count: 6

SCOPUS Cited Count: 8

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

Affiliated Colleges:

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