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Author:

谢红云 (谢红云.) | 纪瑞朗 (纪瑞朗.) | 向洋 (向洋.) | 沙印 (沙印.) | 朱富 (朱富.) | 申晓婷 (申晓婷.)

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incoPat

Abstract:

本发明提供一种吸收区独立且带有周期性光控单元的双极晶体管型硅基光探测器。该探测器制备于SOI衬底上,刻蚀外延片表面部分n型多晶硅层并沉积二氧化硅形成隔离区,将探测器划分为两个相对独立的区域,分别是异质结双极型晶体管区和独立pn结光吸收区。n型多晶硅层作为晶体管发射区,p型SiGe层作为晶体管基区,n型硅层作为晶体管集电区,SOI衬底顶硅层作为晶体管次集电区。独立pn结吸收区由n型多晶硅层和p型SiGe层构成的SiGe/Si pn结,以及n型多晶硅层表面的光窗口组成。独立pn结光吸收区中制备周期性排列的空气孔,形成光控制单元,控制入射光在吸收区的传输方向由垂直传输转化为水平传输。本器件分离了光探测吸收和光电流放大,分别优化吸收区结构参数和双极型晶体管的结面积,能保证光探测器既具备高速响应又拥有更高效的光吸收效率。

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Patent Info :

Type: 发明申请

Patent No.: CN202210183019.9

Filing Date: 2022-02-27

Publication Date: 2022-05-27

Pub. No.: CN114551633A

Applicants: 北京工业大学

Legal Status: 实质审查

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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