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Author:

Wang, G. (Wang, G..) | Chen, J. (Chen, J..) | Meng, J. (Meng, J..) | Yin, Z. (Yin, Z..) | Jiang, J. (Jiang, J..) | Tian, Y. (Tian, Y..) | Li, J. (Li, J..) | Wu, J. (Wu, J..) | Jin, P. (Jin, P..) | Zhang, X. (Zhang, X..)

Indexed by:

Scopus

Abstract:

Recently, hexagonal boron nitride (h-BN), an ultra-wide bandgap semiconductor, has attracted considerable attention owing to its excellent properties. In thin films grown on metal catalysts, contamination and damage induced by a transfer process cannot be avoided. Therefore, synthesizing h-BN films on non-catalytic dielectric substrates is desirable for electronic applications. In this study, we demonstrate the direct growth of high-quality h-BN films with a controllable thickness on sapphire substrates by using the pulsed laser deposition (PLD) technique. The effects of the deposition conditions and laser parameters on the growth of the h-BN films are systematically investigated by evaluating their characteristic Raman peaks. Among the various growth parameters studied, the substrate temperature has the greatest influence on the crystalline quality of the h-BN films, and the optimal pressure varies depending on the target-substrate distance. The h-BN film grown under optimal conditions exhibits a narrow Raman line width of ∼30 cm−1, indicating a high crystalline quality. The photodetectors fabricated from the PLD-grown h-BN films exhibit superior deep-ultraviolet detection performance with a large on/off ratio of >104, high photoresponsivity, and a sharp cut-off wavelength of 220 nm. This study presents the possibility of producing high-quality h-BN films by applying PLD on dielectric substrates for optoelectronic applications. © 2021

Keyword:

Photodetectors Raman spectroscopy Hexagonal boron nitride Pulsed laser deposition

Author Community:

  • [ 1 ] [Wang G.]Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
  • [ 2 ] [Wang G.]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
  • [ 3 ] [Chen J.]Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
  • [ 4 ] [Chen J.]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
  • [ 5 ] [Meng J.]Faculty of Science, Beijing University of Technology, Beijing, 100124, China
  • [ 6 ] [Yin Z.]Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
  • [ 7 ] [Yin Z.]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
  • [ 8 ] [Jiang J.]Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
  • [ 9 ] [Jiang J.]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
  • [ 10 ] [Tian Y.]Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
  • [ 11 ] [Tian Y.]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
  • [ 12 ] [Li J.]Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
  • [ 13 ] [Li J.]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
  • [ 14 ] [Wu J.]Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
  • [ 15 ] [Wu J.]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
  • [ 16 ] [Jin P.]Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
  • [ 17 ] [Jin P.]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
  • [ 18 ] [Zhang X.]Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
  • [ 19 ] [Zhang X.]Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China

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Source :

Fundamental Research

ISSN: 2667-3258

Year: 2021

Issue: 6

Volume: 1

Page: 677-683

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count: 30

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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