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Author:

Sun, Yuting (Sun, Yuting.) | Feng, Yuxia (Feng, Yuxia.) | Wei, Jia (Wei, Jia.) | Wang, Maojun (Wang, Maojun.) | Yang, Xuelin (Yang, Xuelin.) | Mei, Wenkang (Mei, Wenkang.) | Yang, Yufei (Yang, Yufei.) | Shen, Bo (Shen, Bo.)

Indexed by:

EI Scopus SCIE

Abstract:

In this letter, vertically conductive GaN epilayer on SiC substrate was achieved without the typically used conductive buffer layer. Here, in order to reduce the impacts of band offset of different layers on vertical conductivity and improve the vertical carrier transportation, an ultrathin AlGaN buffer layer was employed to replace the thick conductive buffer layer. Fully-vertical Schottky barrier diode (SBD) based on this vertically conductive epi-stack demonstrated a much lower specific on-resistance of 0.84 m omega center dot cm2 with superior thermal stability. Moreover, the SBD also exhibited an on/off ratio of similar to 5 x 109 and a nearly unity ideality factor of 1.08. This approach lays the foundation for the heterogeneous integration of GaN/SiC based devices.

Keyword:

Schottky barrier diode ultrathin buffer layer GaN-on-SiC fully-vertical

Author Community:

  • [ 1 ] [Sun, Yuting]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 2 ] [Feng, Yuxia]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 3 ] [Wei, Jia]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 4 ] [Mei, Wenkang]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 5 ] [Yang, Yufei]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 6 ] [Wang, Maojun]Peking Univ, Inst Microelect, Beijing 100871, Peoples R China
  • [ 7 ] [Yang, Xuelin]Peking Univ, Sch Phys, Beijing 100871, Peoples R China
  • [ 8 ] [Shen, Bo]Peking Univ, Sch Phys, Beijing 100871, Peoples R China

Reprint Author's Address:

  • [Feng, Yuxia]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China

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Source :

SEMICONDUCTOR SCIENCE AND TECHNOLOGY

ISSN: 0268-1242

Year: 2024

Issue: 2

Volume: 39

1 . 9 0 0

JCR@2022

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

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