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Author:

Zhang, Biao (Zhang, Biao.) | Ma, Xiaochen (Ma, Xiaochen.) | Zhu, Hongyan (Zhu, Hongyan.) | Luan, Caina (Luan, Caina.) | Xiao, Hongdi (Xiao, Hongdi.) | Ma, Jingtao (Ma, Jingtao.) | Ma, Jin (Ma, Jin.)

Indexed by:

EI Scopus SCIE

Abstract:

Hexagonal ZnTiO3 (h-ZnTiO3) films with stoichiometric were deposited on alpha-Al2O3 substrates using pulsed laser deposition (PLD) method and post annealing process. The effect of oxygen partial pressure on Zn/Ti atomic ratio, as well as the influence of annealing treatment on the structural and optical properties of the films were investigated in detail. The optimum h-ZnTiO3 film was deposited under 5 Pa oxygen partial pressure and annealed at 800 degrees C, and it exhibited excellent crystalline quality and an optical band gap of 3.72 eV. A photodetector based on the film was fabricated, and its photoresponsivity was approximately 0.18 mA/W under 308 nm ultraviolet light irradiation. This demonstrates that as a wide bandgap semiconductor material, h-ZnTiO3 has potential applications in the field of devices.

Keyword:

Stoichiometric UV photodetector ZnTiO2 Thin film Epitaxial growth

Author Community:

  • [ 1 ] [Zhang, Biao]Shandong Univ, Sch Integrated Circuits, Jinan 250101, Peoples R China
  • [ 2 ] [Zhu, Hongyan]Shandong Univ, Sch Integrated Circuits, Jinan 250101, Peoples R China
  • [ 3 ] [Luan, Caina]Shandong Univ, Sch Integrated Circuits, Jinan 250101, Peoples R China
  • [ 4 ] [Xiao, Hongdi]Shandong Univ, Sch Integrated Circuits, Jinan 250101, Peoples R China
  • [ 5 ] [Ma, Jingtao]Shandong Univ, Sch Integrated Circuits, Jinan 250101, Peoples R China
  • [ 6 ] [Ma, Jin]Shandong Univ, Sch Integrated Circuits, Jinan 250101, Peoples R China
  • [ 7 ] [Ma, Xiaochen]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China

Reprint Author's Address:

  • [Ma, Jin]Shandong Univ, Sch Integrated Circuits, Jinan 250101, Peoples R China;;[Ma, Xiaochen]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China;;

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Source :

JOURNAL OF ALLOYS AND COMPOUNDS

ISSN: 0925-8388

Year: 2024

Volume: 1008

6 . 2 0 0

JCR@2022

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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