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Abstract:
In czochralski silicon with large diameter production, in order to improve the quality of crystal, a cusp magnetic field is often used to reduce melt convection. In this paper, Numerical method is used to analyze how coil radius, the distance between coils and the relative position between equal gauss surface and freedom surface effect melt convection, temperature distribution and the oxygen concentration distribution at growth interface. Results indicate that keeping the same magnetic field strength at the center point of the melt bottom, the radius of the loops and the distance between the loops have little effects on the flow, the temperature and oxygen concentration. When the equal gauss surface is under the freedom surface, the oxygen concentration is lower than that equal gauss surface is equal to the freedom surface. This is agreed with the experiment.
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Journal of Beijing University of Technology
ISSN: 0254-0037
Year: 2008
Issue: SUPPL.
Volume: 34
Page: 23-28
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 2
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