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Abstract:
A room temperature IR detector is designed by using the principle of IR absorption gas directly absorbing IR radiation. After the gas within a closely sealed cavity absorbs IR radiation, the enlarged pressure intensity within the cavity makes the thin film deform. The size of IR radiation can be measured from the capacitive variation quantity of a micro-capacitance which uses the elastic thin film as movable polar plate. The detector made with MEMS technology is sensitive for 8 - 14 μm IR radiation and its sensitivity ≥ 2 × 10-3 pF/mW.
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Opto-Electronic Engineering
ISSN: 1003-501X
Year: 2004
Issue: 2
Volume: 31
Page: 34-36,43
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 0
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