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Author:

Cheng, X. (Cheng, X..) | Wu, Y. (Wu, Y..) | Liu, X. (Liu, X..) (Scholars:刘晓) | Wang, Z. (Wang, Z..) (Scholars:王湛) | Kang, B. (Kang, B..) | Li, J. (Li, J..) | Han, Z. (Han, Z..)

Indexed by:

Scopus PKU CSCD

Abstract:

A new structure IGBT (insulated gate bipolar transister) is proposed for reducing the power dissipation. It features a composite voltage-sustaining layer which includes a n-type buffer layer formed by ultra-deep diffusion and a transparent backside emitter formed by boron implantation. Working in a deep punch-through state during its normal operating condition, it still possesses all the characteristics of the robust non-punch-through IGBT (NPT-IGBT). With a chip-thickness thinner than that of the NPT-IGBT. The new structure presents a better trade-off relationship between the on-state voltage-drop and the turn-off loss. The experimental results show that the power loss of the new structure IGBT is lower than that of the NPT-IGBT by 40%.

Keyword:

Buffer layer; Deep punch through; NPT-IGBT; Transparent emitter

Author Community:

  • [ 1 ] [Cheng, X.]Dept. of Electron., Beijing Polytech. Univ., Beijing 100022, China
  • [ 2 ] [Wu, Y.]Dept. of Electron., Beijing Polytech. Univ., Beijing 100022, China
  • [ 3 ] [Liu, X.]Dept. of Electron., Beijing Polytech. Univ., Beijing 100022, China
  • [ 4 ] [Wang, Z.]Dept. of Electron., Beijing Polytech. Univ., Beijing 100022, China
  • [ 5 ] [Kang, B.]Dept. of Electron., Beijing Polytech. Univ., Beijing 100022, China
  • [ 6 ] [Li, J.]Microelectron. Ctr., Chinese Acad. of Sci., Beijing 100029, China
  • [ 7 ] [Han, Z.]Microelectron. Ctr., Chinese Acad. of Sci., Beijing 100029, China

Reprint Author's Address:

  • [Cheng, X.]Dept. of Electron., Beijing Polytech. Univ., Beijing 100022, China

Email:

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Source :

Chinese Journal of Semiconductors

ISSN: 0253-4177

Year: 2003

Issue: 6

Volume: 24

Page: 586-591

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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