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Abstract:
A new structure IGBT (insulated gate bipolar transister) is proposed for reducing the power dissipation. It features a composite voltage-sustaining layer which includes a n-type buffer layer formed by ultra-deep diffusion and a transparent backside emitter formed by boron implantation. Working in a deep punch-through state during its normal operating condition, it still possesses all the characteristics of the robust non-punch-through IGBT (NPT-IGBT). With a chip-thickness thinner than that of the NPT-IGBT. The new structure presents a better trade-off relationship between the on-state voltage-drop and the turn-off loss. The experimental results show that the power loss of the new structure IGBT is lower than that of the NPT-IGBT by 40%.
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Chinese Journal of Semiconductors
ISSN: 0253-4177
Year: 2003
Issue: 6
Volume: 24
Page: 586-591
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
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Chinese Cited Count:
30 Days PV: 0