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作者:

Piao, L. (Piao, L..) | Piao, R. (Piao, R..) | Chang, X. (Chang, X..) | Hu, Y. (Hu, Y..)

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摘要:

The design, sensitive mechanism and numerical simulation of an fluidic gyroscope based on MEMS with an open airflow channel are reported. The 3D transient numerical analysis based on the fluid-structure interaction was used to calculate the movement of airflow in the sensitive element. Calculations and results indicated that: ①With the drive of piezoelectric pump, the airflow flows into the open airflow channel through two inlets and then gather together. Then, the airflow flows through the nozzle and forms the sensitive jet flow in the fluidic sensing cavity, thus there is a directional flow between inlets and outlet. ②Sensitive jet flow deflects because of the Coriolis Force and exchanges heat with the hotwires which forms the Wheatstone bridge. Therefore, Wheatstone bridge outputs an unbalanced voltage proportional to the applied angular velocity. ③The sensitivity of mentioned gyroscope is SFZ=2.0 μV/°/s, and simultaneously, the nonlinearity is better than 0.5%. © 2017, The Editorial Office of Chinese Journal of Sensors and Actuators. All right reserved.

关键词:

Angular velocity; Fluidic gyroscope; Hotwire; Mems; Open airflow channel

作者机构:

  • [ 1 ] [Piao, L.]Beijing Key Laboratory for sensor, Beijing Information Science and Technology University, Beijing, 100101, China
  • [ 2 ] [Piao, R.]Beijing University of Technology Department Information, Beijing, 100124, China
  • [ 3 ] [Chang, X.]Beijing Key Laboratory for sensor, Beijing Information Science and Technology University, Beijing, 100101, China
  • [ 4 ] [Hu, Y.]Beijing Key Laboratory for sensor, Beijing Information Science and Technology University, Beijing, 100101, China

通讯作者信息:

  • [Piao, L.]Beijing Key Laboratory for sensor, Beijing Information Science and Technology UniversityChina

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来源 :

Chinese Journal of Sensors and Actuators

ISSN: 1004-1699

年份: 2017

期: 10

卷: 30

页码: 1483-1487

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