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作者:

Feng, X. (Feng, X..) | Deng, J. (Deng, J..) | Liu, M. (Liu, M..) | Li, C. (Li, C..) | Zou, D. (Zou, D..)

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Scopus PKU CSCD

摘要:

A microlens with a specific size is fabricated by using melting photoresist, and the microlens can be applied to a shortwave 1 μm ~ 3 μm infrared detector, which can effectively improve the photoelectric performance of the detector. Using AZP4620 thick photoresist and UV lithography technology, the lens production in the soft bake, exposure and development, hardening, hot melt and other processes were carried out in-depth and detailed experimental study was done to determine the optimal process parameters. The micro-lens with a crown diameter of (5.5 ± 0.5) μm and a radius of curvature of 3 μm was realized. The lens has good uniformity and consistency to meet the requirements of near infrared detection device. © 2017, Editorial Office of Opto-Electronic Engineering. All right reserved.

关键词:

Hot melt; Melting photoresist; Microlens array; Pre-baking

作者机构:

  • [ 1 ] [Feng, X.]Key Laboratory of Optoelectronics Technology, Ministry of Education, Faculty of Information Technology, Beijing University of Technology, Beijing, 100124, China
  • [ 2 ] [Deng, J.]Key Laboratory of Optoelectronics Technology, Ministry of Education, Faculty of Information Technology, Beijing University of Technology, Beijing, 100124, China
  • [ 3 ] [Liu, M.]Key Laboratory of Optoelectronics Technology, Ministry of Education, Faculty of Information Technology, Beijing University of Technology, Beijing, 100124, China
  • [ 4 ] [Li, C.]Key Laboratory of Optoelectronics Technology, Ministry of Education, Faculty of Information Technology, Beijing University of Technology, Beijing, 100124, China
  • [ 5 ] [Zou, D.]Key Laboratory of Optoelectronics Technology, Ministry of Education, Faculty of Information Technology, Beijing University of Technology, Beijing, 100124, China

通讯作者信息:

  • 冯宪

    [Feng, X.]Key Laboratory of Optoelectronics Technology, Ministry of Education, Faculty of Information Technology, Beijing University of TechnologyChina

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来源 :

Opto-Electronic Engineering

ISSN: 1003-501X

年份: 2017

期: 6

卷: 44

页码: 633-637

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