Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures - 文章详情页

作者：

Kong, L. (Kong, L..) | Deng, J. (Deng, J..) | Chen, L. (Chen, L..) | Shen, Z. (Shen, Z..) | Wang, J. (Wang, J..)

收录：

Scopus

摘要：

ZnS　thin　films　were　deposited　by　radio　frequency　(RF)　sputtering　with　substrate　temperatures　from　room　temperature　to　400°C.　The　effect　of　substrate　temperature　on　structural　and　optical　properties　for　the　ZnS　films　was　investigated.　The　systematic　investigation　at　different　substrate　temperatures　of　the　properties　of　sputtered　ZnS　films　especially　optical　constants　obtained　through　spectroscopic　ellipsometry　can　provide　some　guidance　for　ZnS　films　to　be　applied　in　thin　film　solar　cells　as　buffer　layers.　The　choice　of　sputtering　fabrication　method　may　promote　the　full　sputtering　technique　route　in　CIGS　or　CZTS　solar　cells　which　is　beneficial　to　the　solar　cell　industrialization.　©　2017　-　STC　＂Institute　for　Single　Crystals＂.

关键词：

RF magnetron sputtering; Spectroscopic ellipsometry; Urbach energy; ZnS thin films

作者机构：

[ 1 ] [Kong, L.]College of Applied Sciences, Beijing University of Technology, Beijing, 100124, China
[ 2 ] [Deng, J.]College of Applied Sciences, Beijing University of Technology, Beijing, 100124, China
[ 3 ] [Chen, L.]College of Applied Sciences, Beijing University of Technology, Beijing, 100124, China
[ 4 ] [Shen, Z.]College of Applied Sciences, Beijing University of Technology, Beijing, 100124, China
[ 5 ] [Wang, J.]College of Applied Sciences, Beijing University of Technology, Beijing, 100124, China

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