This　paper　presents　the　modelling　and　design　analysis　of　V-　and　Z-shaped　electrothermal　microactuators.　First,　a　comprehensive　but　concise　closed-form　multiphysical　analytical　model　is　developed　to　predict　the　output　displacement　and　force　of　both　V-and　Z-shaped　electrothermal　microactuators　operating　either　in　vacuum　or　in　air　conditions.　The　analytical　model　is　verified　by　finite　element　analysis　and　experimental　testing.　Then,　a　novel　comparison　benchmark　is　proposed　for　the　design　and　analysis　of　the　V-and　Z-shaped　microactuators.　With　the　multiphysical　model　and　comparison　benchmark,　comprehensive　performance　comparison　and　analysis　of　the　V-and　Z-shaped　beams　are　performed　with　the　aim　of　providing　insight　and　guidance　on　selection　and　design　of　the　two　typical　types　of　electrothermal　microactuators.　Finally,　the　application　of　the　comparison　model　into　the　design　analysis　is　demonstrated　using　a　design　example　of　an　electrothermal　microactuator,　and　the　detailed　investigation　is　conducted　to　examine　the　effects　of　the　material　properties　and　structural　parameters　on　the　microactuator　outputs.