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作者:

Dong, Yibo (Dong, Yibo.) | Han, Jun (Han, Jun.) | Xu, Chen (Xu, Chen.) (学者:徐晨) | Xie, Yiyang (Xie, Yiyang.) | Xun, Meng (Xun, Meng.) | Pan, Guanzhong (Pan, Guanzhong.) | Sun, Jie (Sun, Jie.)

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EI Scopus SCIE

摘要:

Improving light extraction efficiency is the key issue for light-emitting diodes (LEDs). Nowadays, a vertical structure design dominates LEDs. However, the light from the active region just below the p-electrode is severely blocked by the metal contact. In this letter, we use proton implantation with a depth all the way to the active region to turn the part beneath the p-pad insulating, which constitutes the most-effective-ever current blocking method. Earlier particle implantation studies never reached the device active region. Our experimental results show that the H+-implanted LEDs improve the light output power by 75% compared with non-implanted counterparts and the light intensity increases by 64.48%. By virtue of indium tin oxide current spreading film, the increase in working voltage is negligible. Analyzing the reverse leakage current, the side effect associated with the implantation is limited to an acceptable range. Numerical simulation is performed to support the experiment. Our results represent a new and simple method for solving the light blocking problem in vertical LEDs, without introducing the seemingly existing severe implantation damage to the device structure.

关键词:

Light emitting diodes energy efficiency ion implantation indium phosphide

作者机构:

  • [ 1 ] [Dong, Yibo]Beijing Univ Technol, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Han, Jun]Beijing Univ Technol, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Xu, Chen]Beijing Univ Technol, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Xie, Yiyang]Beijing Univ Technol, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 5 ] [Xun, Meng]Beijing Univ Technol, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 6 ] [Pan, Guanzhong]Beijing Univ Technol, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Sun, Jie]Beijing Univ Technol, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 8 ] [Sun, Jie]Chalmers, Dept Microtechnol & Nanosci, S-41296 Gothenburg, Sweden

通讯作者信息:

  • 徐晨

    [Xu, Chen]Beijing Univ Technol, Key Lab Optoelect Technol, Beijing 100124, Peoples R China

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来源 :

IEEE ELECTRON DEVICE LETTERS

ISSN: 0741-3106

年份: 2016

期: 10

卷: 37

页码: 1303-1306

4 . 9 0 0

JCR@2022

ESI学科: ENGINEERING;

ESI高被引阀值:166

中科院分区:2

被引次数:

WoS核心集被引频次: 4

SCOPUS被引频次: 7

ESI高被引论文在榜: 0 展开所有

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中文被引频次:

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