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作者:

Li, Jian (Li, Jian.) | Ji, Lingfei (Ji, Lingfei.) (学者:季凌飞) | Hu, Yan (Hu, Yan.) | Bao, Yong (Bao, Yong.)

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Scopus SCIE

摘要:

High quality micro-sized steps and blind hole structures without microcracks, chips or spatter deposition were machined on yttria-tetragonal zirconia polycrystal (Y-TZP, 3 mol% yttria) by nanosecond laser (wavelength=532 nm, pulse width similar to 6 ns). The diameter of blind hole is 500 pm and each step is 500 10 pm wide and 100 +/- 5 pm deep. The 1.35 mm(3)/min removal rate and the smooth machined surface with Ra=2.824 pm roughness depicting the high precise and efficient processing were achieved. The ablation characteristics of nanosecond laser process of Y-TZP ceramic were also studied. Based on the study, a reasonable design of the processing path for micromachining of a finer embedded step with 24 +/- 2 mu m width (smaller than the 60 pm focused spot size) around the inner-wall of a 2 x 2 mm(2) cavity was developed. These results and discussion offer new possibilities in the manufacturing of bio-ceramic products by nanosecond laser with high processing quality and efficient. (C) 2015 Elsevier Ltd and Techna Group S.r.l. All rights reserved.

关键词:

Precise structure Nanosecond laser Machining threshold Laser micromachining Y-TZP ceramic

作者机构:

  • [ 1 ] [Li, Jian]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 2 ] [Ji, Lingfei]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 3 ] [Hu, Yan]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 4 ] [Bao, Yong]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China

通讯作者信息:

  • 季凌飞

    [Ji, Lingfei]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China

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来源 :

CERAMICS INTERNATIONAL

ISSN: 0272-8842

年份: 2016

期: 3

卷: 42

页码: 4377-4385

5 . 2 0 0

JCR@2022

ESI学科: MATERIALS SCIENCE;

ESI高被引阀值:305

中科院分区:1

被引次数:

WoS核心集被引频次: 29

SCOPUS被引频次: 36

ESI高被引论文在榜: 0 展开所有

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