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作者:

Zhai, Tianrui (Zhai, Tianrui.) (学者:翟天瑞) | Wu, Xiaofeng (Wu, Xiaofeng.) | Wang, Yonglu (Wang, Yonglu.) | Zhang, Xinping (Zhang, Xinping.) (学者:张新平)

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Scopus SCIE

摘要:

Nanogratings with different duty cycles are directly written on gold films using interference ablation. After exposing the gold film to the interference pattern of ultraviolet laser beams, gold film in the bright fringes will be melted and ablated, whereas much weaker ablation occurs in the dark fringes. The duty cycle of gold nanogratings can be controlled by adjusting the pulse energy and the exposure times, which can be explained by the temperature rise and cumulative effect of the laser-metal interactions. These results introduce additional parameters for the fine fabrication of metal nanogratings based on interference ablation at a large scale and low cost. (C) 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)

关键词:

duty cycle gold film interference ablation nanogratings

作者机构:

  • [ 1 ] [Zhai, Tianrui]Beijing Univ Technol, Inst Informat Photon Technol, 100 Ping Le Yuan, Beijing 100124, Peoples R China
  • [ 2 ] [Zhai, Tianrui]Beijing Univ Technol, Coll Appl Sci, 100 Ping Le Yuan, Beijing 100124, Peoples R China
  • [ 3 ] [Zhang, Xinping]Beijing Univ Technol, Inst Informat Photon Technol, 100 Ping Le Yuan, Beijing 100124, Peoples R China
  • [ 4 ] [Zhang, Xinping]Beijing Univ Technol, Coll Appl Sci, 100 Ping Le Yuan, Beijing 100124, Peoples R China

通讯作者信息:

  • 翟天瑞 张新平

    [Zhai, Tianrui]Beijing Univ Technol, Inst Informat Photon Technol, 100 Ping Le Yuan, Beijing 100124, Peoples R China;;[Zhang, Xinping]Beijing Univ Technol, Inst Informat Photon Technol, 100 Ping Le Yuan, Beijing 100124, Peoples R China

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来源 :

JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS

ISSN: 1932-5150

年份: 2016

期: 1

卷: 15

2 . 3 0 0

JCR@2022

ESI学科: ENGINEERING;

ESI高被引阀值:102

中科院分区:4

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