Translated Title
The Study on Low Cracking of Soda-lime Glass Micro-Groove Etched by 248 nm Excimer Laser
Translated Abstract
The soda-lime glass micro-groove is etched directly by 248 nm excimer laser to produce Bio-chip,which have great advantage and potentiality,but there are many problems now,such as it is easy to crack and the roughness of the groove bottom surface is very poor.Based on 248 nm excimer laser,two ways of processing soda-lime glass are used to study the low carcking in this paper,which are static etching and scanning etching.Firstly,the relationship between the process parameter and the quality of the glass micro-groove is studied by experiment,and then the mechanism of glass cracking processed by 248 nm excimer laser is analyzed.Finally,we have improved the process of etching glass micro-groove to improve the quality,which is changing the process parameter.From the experiment results,as the laser fluence increasing,the crack degree at the glass micro-groove edge is increasing and the roughness on the etching surface is also increasing,so the quality of the glass micro-groove is more and more poorer.The rough surface etched by laser can increase the absorption of incident laser energy,so the threshold of the laser etching glass material can be reduced,and the roughness of the etching surface can reduced by the lower laser fluence.From the experiment of process improved,the quality of the glass micro-groove is improved,the crack size at the glass micro-groove edge is less than 5 μm,the roughness of the bottom surface Ra can be reduced to 1.5μm.So the results of this paper will provide a reference to improve the quality of laser processing glass microstructure.
Translated Keyword
glass surface etching
bio-chip
glass micro-groove processing
excimer laser processing
Access Number
WF:perioarticalyyjg201704020
Corresponding authors email
