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摘要:
Polarization-stable 980nm oxide-confined vertical-cavity surface-emitting lasers with 3 mu m diamond-shaped aperture are fabricated by comprehensively utilizing the anisotropic properties of wet etching and wet nitrogen oxidation of III-V semiconductor materials. Polarization-stable operation along the major axis of the diamond-shaped oxide aperture with 11 dB orthogonal polarization suppression ratio is achieved in a temperature range of 15-55 degrees C from the threshold to 4 mA.
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