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作者:

Meng, Jiao (Meng, Jiao.) | Song, Haiying (Song, Haiying.) | Li, Xiaoli (Li, Xiaoli.) (学者:李晓理) | Liu, Shibing (Liu, Shibing.) (学者:刘世炳)

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EI Scopus SCIE

摘要:

An efficient approach for enhancing the surface antireflection is proposed, in which a black silicon is fabricated by a femtosecond laser in alkaline solution. In the experiment, 2 wt% NaOH solution is formulated at room temperature (22 +/- A 1 A degrees C). Then, a polished silicon is scanned via femtosecond laser irradiation in 2 wt% NaOH solution. Jungle-like microstructures on the black silicon surface are characterized using an atomic force microscopy. The reflectance of the black silicon is measured at the wavelengths ranging from 400 to 750 nm. Compared to the polished silicon, the black silicon can significantly suppress the optical reflection throughout the visible region (< 5 %). Meanwhile, we also investigated the factors of the black silicon, including the femtosecond laser pulse energy and the scanning speed. This method is simple and effective to acquire the black silicon, which probably has a large advantage in fast and cost-effective black silicon fabrication.

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作者机构:

  • [ 1 ] [Meng, Jiao]Beijing Univ Technol, Inst Laser Engn, Strong Field & Ultrafast Photon Lab, Beijing 100124, Peoples R China
  • [ 2 ] [Song, Haiying]Beijing Univ Technol, Inst Laser Engn, Strong Field & Ultrafast Photon Lab, Beijing 100124, Peoples R China
  • [ 3 ] [Li, Xiaoli]Beijing Univ Technol, Inst Laser Engn, Strong Field & Ultrafast Photon Lab, Beijing 100124, Peoples R China
  • [ 4 ] [Liu, Shibing]Beijing Univ Technol, Inst Laser Engn, Strong Field & Ultrafast Photon Lab, Beijing 100124, Peoples R China

通讯作者信息:

  • 刘世炳

    [Liu, Shibing]Beijing Univ Technol, Inst Laser Engn, Strong Field & Ultrafast Photon Lab, Beijing 100124, Peoples R China

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来源 :

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

ISSN: 0947-8396

年份: 2015

期: 4

卷: 118

页码: 1197-1203

2 . 7 0 0

JCR@2022

ESI学科: PHYSICS;

ESI高被引阀值:134

JCR分区:3

中科院分区:4

被引次数:

WoS核心集被引频次: 12

SCOPUS被引频次: 14

ESI高被引论文在榜: 0 展开所有

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