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The maximum power conversion efficiencies of the top-emitting, oxide-confined, two-dimensional integrated 2x2 and 4x4 vertical-cavity surface-emitting laser (VCSEL) arrays with the oxide-apertures of 6 mu m, 16 mu m, 19 mu m, 26 mu m, 29 mu m, 36 mu m, 39 mu m, and 46 mu m are fabricated and characterized, respectively. The maximum power conversion efficiencies increase rapidly with the augment of oxide-aperture at the beginning and then decrease slowly. A maximum value of 27.91% at an oxide-aperture of 18.6 mu m is achieved by simulation. The experimental data are well consistent with the simulation results, which are analyzed by utilizing an empirical model.
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