This　paper　presents　a　new　type　micro-actuator　which　is　driven　by　the　thermal　bubble　generated　with　induction　heating.　The　water　inside　the　actuator＇s　chamber　is　heated　by　induction　heating　devices　and　changes　from　liquid　phase　to　gas　phase,　generating　vapor　bubbles　in　the　micro-actuator　chamber.　The　volume　of　the　bubble　expands　rapidly　and　the　pressure　in　the　chamber　of　the　micro-actuator　increases　sharply.　This　pressure　will　push　most　of　the　water　out　of　the　chamber　through　the　nozzle.　Moreover,　the　reaction　force　of　the　water　will　cause　the　micro-actuator　to　move　forward.　Key　parameters　of　the　actuator　are　in　micro-scale,　such　as　the　diameter　of　the　inlet　is　40　mu　m,　the　micro-heater　core　with　an　inner　diameter　of　100　mu　m　and　the　nozzle　with　a　diameter　of　200　mu　m.　A　prototype　of　the　micro-actuator　is　fabricated　and　experiments　are　conducted　on　the　micro-actuator　motion　in　water.　The　experiments　show　that　the　average　velocity　of　the　micro-actuator　is　about　0.14　mm/s　when　the　power　is　at　0.535W　while　the　actuator　is　in　contact　with　the　bottom　of　the　water　container.　Compared　with　the　resistor　thermal　bubble　micro-actuator,　this　micro-actuator　has　higher　power　bubble　and　larger　reaction　force.　This　micro-actuator　can　be　used　to　drive　micro-robotic　in　liquid　and　this　new　driving　mode　can　also　be　applied　in　a　variety　of　micro-fluid　devices,　such　as　the　micro-jets,　micro-switches　and　micro-pumps.　(C)　2014　Elsevier　B.V.　All　rights　reserved.