Voltage　bias　of　several　hundred　volts　which　are　applied　between　solar　cells　and　module　frames　may　lead　to　significant　power　losses,　so-called　potential-induced　degradation　(PID),　in　normal　photovoltaic　(PV)　installations　system.　Modules　and　minimodules　are　used　to　conduct　PID　test　of　solar　cells.　The　test　procedure　is　time　consuming　and　of　high　cost,　which　cannot　be　used　as　process　monitoring　method　during　solar　cells　fabrication.　In　this　paper,　three　kinds　of　test　including　minimodule,　R-sh,　and　V-Q　test　are　conducted　on　solar　cells　or　wafers　with　SiNx　of　different　refractive　index.　All　comparisons　between　test　results　of　R-sh,　V-Q,　and　minimodule　tests　have　shown　equal　results.　It　is　shown　that　R-sh　test　can　be　used　as　quality　inspection　of　solar　cells　and　V-Q　test　of　coated　wafer　can　be　used　as　process　control　of　solar　cells.