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摘要:
Strain engineering in semiconductor nanostructure has been received great attention because their ultra-large elastic limit can induce a broad tuning range of the physical properties. Here, we report how the electrical transport properties of the p-type. < 100 >-oriented Si nanowires may be tuned by bending strain and affected by the plastic deformation in a transmission electron microscope. These freestanding nanowires were prepared from commercial silicon-on-insulator materials using the focusing ion beam technique. Results show that the conductivity of these Si nanowires is improved remarkably by bending strain when the strain is lower than 2%, while the improvement is nearly saturated when the strain approaches to 2%. The electric current will reduce a little sometimes when strain exceeds 3%, which may result from plastic events. Our experimental results may be helpful to Si strain engineering.
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来源 :
ACTA PHYSICA SINICA
ISSN: 1000-3290
年份: 2014
期: 11
卷: 63
1 . 0 0 0
JCR@2022
ESI学科: PHYSICS;
ESI高被引阀值:202
JCR分区:3
中科院分区:4
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