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摘要:
Tantalum-pentoxide (Ta2O5) single crystals doped with Ti were grown by the floating zone method. X-ray diffraction (XRD) characterization indicates that the crystal symmetry of Ti-doped Ta2O5 crystals is tetragonal. The dielectric dissipation is decreased and the dielectric constant is greatly enhanced by doping Ti. The dielectric permittivity along [100] direction of (Ta2O5)(0.95)(TiO2)(0.05) crystal measured at 1 MHz and room temperature is 711, which is eight times more than that of Ta2O5 crystal. Dielectric properties measurement demonstrates a strongly anisotropic dielectric constant along the [100] and [001] directions of Ti-doped Ta2O5 crystals. At room temperature the dielectric constant along [100] direction is about twenty times of that along [001] direction in (Ta2O5) 0.95(TiO2) 0.05 crystal while only three times in Ta2O5 crystal. The results suggest that Ti-doped Ta2O5 crystal materials show great value and potential for both of theoretical study on dielectrics and application in microelectronics devices. (C) 2013 Elsevier B. V. All rights reserved.
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JOURNAL OF ALLOYS AND COMPOUNDS
ISSN: 0925-8388
年份: 2014
卷: 588
页码: 42-45
6 . 2 0 0
JCR@2022
ESI学科: MATERIALS SCIENCE;
ESI高被引阀值:256
JCR分区:1
中科院分区:1