收录:
摘要:
In order to diagnose the unbalance of aerostatic guideways, displacement and acceleration sensors were used to measure the vibration signals of the unbalance of the aerostatic guideways caused by the gas fluctuation. The frequency characteristics for the unbalance of aerostatic guideways caused by gas fluctuation has been extracted from the measured signals by power spectral density, and the basic frequencies of the guideway system have been diagnosed according to spectral characteristics, in agreement with the results calculated by the corresponding motion equations and the finite element method.
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通讯作者信息:
来源 :
SENSORS
ISSN: 1424-8220
年份: 2014
期: 3
卷: 14
页码: 4416-4427
3 . 9 0 0
JCR@2022
ESI学科: CHEMISTRY;
ESI高被引阀值:258
JCR分区:1
中科院分区:2