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作者:

Chen, Dongju (Chen, Dongju.) (学者:陈东菊) | Bian, Yanhua (Bian, Yanhua.) | Fan, Jinwei (Fan, Jinwei.) (学者:范晋伟)

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摘要:

In order to diagnose the unbalance of aerostatic guideways, displacement and acceleration sensors were used to measure the vibration signals of the unbalance of the aerostatic guideways caused by the gas fluctuation. The frequency characteristics for the unbalance of aerostatic guideways caused by gas fluctuation has been extracted from the measured signals by power spectral density, and the basic frequencies of the guideway system have been diagnosed according to spectral characteristics, in agreement with the results calculated by the corresponding motion equations and the finite element method.

关键词:

unbalance aerostatic guideway gas fluctuation identification micro-scale

作者机构:

  • [ 1 ] [Chen, Dongju]Beijing Univ Technol, Coll Mech Engn & Appl Elect Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Bian, Yanhua]Beijing Univ Technol, Coll Mech Engn & Appl Elect Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Fan, Jinwei]Beijing Univ Technol, Coll Mech Engn & Appl Elect Technol, Beijing 100124, Peoples R China

通讯作者信息:

  • 陈东菊

    [Chen, Dongju]Beijing Univ Technol, Coll Mech Engn & Appl Elect Technol, Beijing 100124, Peoples R China

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来源 :

SENSORS

ISSN: 1424-8220

年份: 2014

期: 3

卷: 14

页码: 4416-4427

3 . 9 0 0

JCR@2022

ESI学科: CHEMISTRY;

ESI高被引阀值:258

JCR分区:1

中科院分区:2

被引次数:

WoS核心集被引频次: 3

SCOPUS被引频次: 3

ESI高被引论文在榜: 0 展开所有

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