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We investigated enhancement of sensitivity of sensors based on metallic photonic crystals through tuning the thickness of the waveguide layer by pulsed laser deposition. Thicker waveguides made of InGaZnO allow double resonance of Fano coupling modes due to plasmonic-photonic interactions. Tuning the angle of incidence enables overlap between these doubly resonant modes, which induces much enlarged and spectrally narrowed sensor signals, leading to significantly enhanced sensitivity of the sensor device. The thickness of the waveguide layer is found to be a crucial structural parameter to improve sensitivity of the MPC sensors. (C) 2014 Optical Society of America
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