In　the　paper,　a　three-dimensional　finite　element　model　was　developed　to　demonstrate　the　temperature　field　induced　by　a　nanosecond　pulsed　excimer　laser　in　the　phase-change　film.　The　numerical　model　was　established　with　an　assumed　rectangular　temporal　profile,　following　the　continuous　medium　heat　conduction　theory　with　semi-infinity　heat　conduction.　It　showed　that　the　temperature　variation　followed　the　exponential　relation　in　both　the　heating/cooling　procedures,　and　the　whole　heating/cooling　process　was　divided　into　four　regions　I-IV,　namely　rapid　heating　region　I　and　equilibrium　heating　region　II　in　the　heating　process　as　well　as　quick　cooling　region　III　and　equilibrium　cooling　region　IV　in　the　cooling　process.　The　heating/cooling　rates　were　then　fitted　from　the　temperature　variation　curve.　The　calculated　heating/cooling　rates　were　in　the　scale　of　10(8)-10(11)　K/s　for　the　nano-scale　pulse　radiance.　Furthermore,　the　effects　of　laser　fluence　and　pulse　duration　on　the　temperature　field　were　investigated.　It　was　noted　that　the　effect　of　pulse　duration　was　focused　on　regions　II　and　III,　while　the　heating　rate　in　region　I　was　mainly　determined　by　laser　fluence.　(C)　2013　Elsevier　B.V.　All　rights　reserved.