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作者:

Mao, Ming-Ming (Mao, Ming-Ming.) | Xu, Chen (Xu, Chen.) (学者:徐晨) | Xie, Yi-Yang (Xie, Yi-Yang.) | Kan, Qiang (Kan, Qiang.) | Xun, Meng (Xun, Meng.) | Xu, Kun (Xu, Kun.) | Wang, Jun (Wang, Jun.) | Ren, Hai-Qiang (Ren, Hai-Qiang.) | Chen, Hong-Da (Chen, Hong-Da.)

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EI Scopus SCIE

摘要:

Two-dimensional in-phase coherently coupled vertical cavity surface emitting laser (VCSEL) array with high beam quality was fabricated by proton implantation. Indium-tin-oxide (ITO) current spreading layer was employed to improve the uniformity of the injection current. This makes a coherent array to operate in in-phase mode even in a relatively larger scale. The appropriate thickness of ITO current spreading layer was obtained by experiment (80 nm). The procedure of proton implantation defined array is considerably simple and low cost. A 3 x 3 in-phase coherently coupled array with 2.4 degrees (1.28 x D.L.) of lobe beamwidth was achieved. It sufficiently demonstrates the advantages of the high beam quality of the in-phase coherently coupled arrays. The output power of the array was up to 4.5 mw under pulse-wave condition.

关键词:

Coherently coupled VCSEL array high beam quality in-phase

作者机构:

  • [ 1 ] [Mao, Ming-Ming]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 2 ] [Xu, Chen]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 3 ] [Xun, Meng]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 4 ] [Xu, Kun]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 5 ] [Wang, Jun]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 6 ] [Ren, Hai-Qiang]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 7 ] [Xie, Yi-Yang]Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
  • [ 8 ] [Kan, Qiang]Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
  • [ 9 ] [Chen, Hong-Da]Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China

通讯作者信息:

  • 徐晨

    [Xu, Chen]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China

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来源 :

IEEE PHOTONICS JOURNAL

ISSN: 1943-0655

年份: 2013

期: 6

卷: 5

2 . 4 0 0

JCR@2022

ESI学科: PHYSICS;

ESI高被引阀值:162

JCR分区:1

中科院分区:2

被引次数:

WoS核心集被引频次: 16

SCOPUS被引频次: 17

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

近30日浏览量: 2

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