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Two-dimensional in-phase coherently coupled vertical cavity surface emitting laser (VCSEL) array with high beam quality was fabricated by proton implantation. Indium-tin-oxide (ITO) current spreading layer was employed to improve the uniformity of the injection current. This makes a coherent array to operate in in-phase mode even in a relatively larger scale. The appropriate thickness of ITO current spreading layer was obtained by experiment (80 nm). The procedure of proton implantation defined array is considerably simple and low cost. A 3 x 3 in-phase coherently coupled array with 2.4 degrees (1.28 x D.L.) of lobe beamwidth was achieved. It sufficiently demonstrates the advantages of the high beam quality of the in-phase coherently coupled arrays. The output power of the array was up to 4.5 mw under pulse-wave condition.
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