Film　thickness,　component　and　content　based　on　glass　surface　were　determined　by　using　XRF　technic,　measure　condition　and　instrument　work　condition　in　every　layer　were　set　and　adjusted　for　the　best　measure　effect　for　every　element.　Background　fundamental　parameter　(BG-FP)　method　was　built　up.　Measure　results　with　this　method　were　consistent　with　the　actual　preparation　course　and　the　method　could　fit　to　production　application.