The　residual　stresses　in　Pb(Zr0.3Ti0.7)O-3　thin　films　were　measured　by　the　sin(2)　Psi　method　using　the　normal　X-ray　incidence.　The　spacing　of　different　planes　(hkl)　parallel　to　the　film　surface　were　converted　to　the　spacing　of　a　set　of　inclined　planes　(100).　The　angles　between　(100)　and　(hkl)　were　equivalent　to　the　tilting　angles　of　(100)　from　the　normal　of　film　surface.　The　residual　stresses　were　extracted　from　the　linear　slope　of　the　strain　difference　between　the　equivalent　inclined　direction　and　normal　direction　with　respect　to　the　sin(2)　Psi.　The　results　were　in　consistency　with　that　derived　from　the　conventional　sin(2)　Psi　method.　(C)　2013　The　Japan　Society　of　Applied　Physics