Hydrogenated　amorphous　silicon　(a-Si:H)　and　microcrystalline　silicon　(mu　c-Si:H)　films　fabricated　on　glass　substrate　are　crystallized　through　solid　phase　crystallization　process.　In　this　study,　the　crystalline　phase　in　mu　c-Si:H　films　could　decrease　process　temperature,　but　prevent　the　film　from　crystallized　completely.　In　counterpart,　the　a-Si:　H　films　need　higher　annealing　temperature　to　achieve　crystallization,　but　could　reach　a　better　crystallinity.　The　fact　that　mu　c-Si:H　films　do　not　crystallize　completely　is　attributed　to　the　initial　microcrystals　in　the　mu　c-Si:H　films,　which　avoid　the　relaxation　of　the　film　structure　and　inhibit　the　crystallization　process.　In　addition,　the　effusion　of　hydrogen　could　promote　the　relaxation　of　a-Si　but　not　induce　direct　crystallization.　(C)　2013　Elsevier　B.　V.　All　rights　reserved.