Based　on　an　analysis　of　the　grating　coupler,　a　high-efficiency　hybrid　surface-normal　coupler,　which　is　a　combination　of　a　coupler　grating,　reflector　grating　and　a　bottom　mirror,　was　designed　to　couple　a　planar　waveguide　and　a　single-mode　fiber.　The　negative　second-order　reflection　was　reduced　by　destructive　interference　by　selecting　a　reasonable　spacing　between　the　reflector　and　the　coupler　grating.　The　negative　first-order　diffraction　to　the　substrate　was　reflected　by　the　bottom　mirror,　which　was　realized　by　Au-Au　bonding.　The　etch　depth　of　the　coupler　grating　was　optimized　to　increase　the　coupling　efficiency　between　the　grating　and　the　fiber.　The　highest　coupling　efficiency　of　89.5%　at　1550　nm　was　achieved　for　surface　normal　coupling.