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作者:

Zhang, Lu (Zhang, Lu.) | Wang, Xiaoliang (Wang, Xiaoliang.) | Xiao, Hongling (Xiao, Hongling.) | Chen, Hong (Chen, Hong.) | Feng, Chun (Feng, Chun.) | Shen, Guangdi (Shen, Guangdi.) | Wang, Zhanguo (Wang, Zhanguo.) | Hou, Xun (Hou, Xun.)

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Scopus SCIE

摘要:

The AlGaN/GaN/InGaN/GaN double heterojunction high electron mobility transistors (DH-HEMTs) sample has been grown by MOCVD on (0 0 0 1) sapphire substrate. The structure features a 7 nm In0.046Ga0.954N interlayer determined by Rutherford backscattering (RBS). Since the polarization field in the InGaN interlayer is opposite to it in the AlGaN layer, an additional potential barrier is introduced between the two-dimensional electron gas (2DEG) channel and buffer, leading to enhanced carrier confinement and improved buffer isolation. The GaN layers between the AlGaN layer and InGaN interlayer are divided into two layers consisting of GaN channel layer which provides high mobility 2DEG grown at 1070 degrees C and GaN spacer layer grown at the same temperature as InGaN interlayer (800 degrees C) to prevent indium diffusion. RBS measurement confirms that the 3 nm GaN spacer layer isolates the InGaN interlayer well and free from diffusion. Hall measurement has been performed, the mobility as high as 1552 cm(2)/V s at room temperature is obtained and the sheet carrier density is 1.55 x 10(13) cm(-2). The average sheet resistance is 331 Omega/sq, respectively. The mobility obtained in this paper is about 20% higher than similar structures reported.

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作者机构:

  • [ 1 ] [Zhang, Lu]Beijing Univ Technol, Beijing Optoelect Technol Lab, Beijing 100022, Peoples R China
  • [ 2 ] [Shen, Guangdi]Beijing Univ Technol, Beijing Optoelect Technol Lab, Beijing 100022, Peoples R China
  • [ 3 ] [Zhang, Lu]Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
  • [ 4 ] [Wang, Xiaoliang]Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
  • [ 5 ] [Xiao, Hongling]Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
  • [ 6 ] [Chen, Hong]Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
  • [ 7 ] [Feng, Chun]Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
  • [ 8 ] [Wang, Zhanguo]Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
  • [ 9 ] [Wang, Xiaoliang]Xi An Jiao Tong Univ, Xian 710049, Peoples R China
  • [ 10 ] [Hou, Xun]Xi An Jiao Tong Univ, Xian 710049, Peoples R China

通讯作者信息:

  • [Zhang, Lu]Beijing Univ Technol, Beijing Optoelect Technol Lab, Beijing 100022, Peoples R China

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来源 :

EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS

ISSN: 1286-0042

年份: 2013

期: 2

卷: 62

1 . 0 0 0

JCR@2022

ESI学科: PHYSICS;

ESI高被引阀值:162

JCR分区:4

中科院分区:4

被引次数:

WoS核心集被引频次: 4

SCOPUS被引频次: 4

ESI高被引论文在榜: 0 展开所有

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