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Metals with well ordered porous networks exhibit interesting electronics, photonics and antimicrobial properties, but fabrication of ordered porous metal by sputtering deposition is difficult. A new method to develop arrayed nanoporous multilayered films in the Ag/W system has been reported in this work. The results show that the structure of the multilayers is dependent on the periodicity. Multilayers with periodicity not larger than 30 nm have an arrayed porous structure. The formation of the porous structure can be ascribed to the initial Volmer-Weber growth due to the large positive enthalpy of mixing Ag and W and the following shadowing effect during alternate sputtering deposition. This method gives a controllable way to fabricate nanoporous binary immiscible metal films.
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