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作者:

Sun Pei (Sun Pei.) | Li Jian-Jun (Li Jian-Jun.) | Deng Jun (Deng Jun.) | Han Jun (Han Jun.) | Ma Ling-Yun (Ma Ling-Yun.) | Liu Tao (Liu Tao.)

收录:

EI Scopus SCIE PKU CSCD

摘要:

The (Al0.1Ga0.9)(0.5)In0.5P, four-element alloy, whose band is direct, is used to make optoelectronic devices. The wavelength of the material is about 630nm. When it is epitaxially grown by low press-metalorganic chemical vapor deposition(LP-MOCVD), its quality will depend on temperature, one of the most important conditions. So it is essential to find out the best temperature of growth. The quantum wells of the (Al0.1Ga0.9)(0.5)In0.5P are grown at 700 degrees C, 680 degrees C, 670 degrees C and 660 degrees C respectively. The best temperature, which is found out by the results of photoluminescence PL, is about 670 degrees C. The reasons are given by the results of PL, surfaces of wafers and the flow field simulation of MOCVD. The revaporization of In at high temperature and the incorporation of O at low temperature can lead to bad quality. An available path to solve growth at high temperature is to increase the effective density of In.

关键词:

AlGaInP MOCVD temperature

作者机构:

  • [ 1 ] [Sun Pei]Beijing Univ Technol, Educ Minist, Key Lab Optoelect Technol, Coll Elect Informat & Control Engn, Beijing 100022, Peoples R China
  • [ 2 ] [Li Jian-Jun]Beijing Univ Technol, Educ Minist, Key Lab Optoelect Technol, Coll Elect Informat & Control Engn, Beijing 100022, Peoples R China
  • [ 3 ] [Deng Jun]Beijing Univ Technol, Educ Minist, Key Lab Optoelect Technol, Coll Elect Informat & Control Engn, Beijing 100022, Peoples R China
  • [ 4 ] [Han Jun]Beijing Univ Technol, Educ Minist, Key Lab Optoelect Technol, Coll Elect Informat & Control Engn, Beijing 100022, Peoples R China
  • [ 5 ] [Ma Ling-Yun]Beijing Univ Technol, Educ Minist, Key Lab Optoelect Technol, Coll Elect Informat & Control Engn, Beijing 100022, Peoples R China
  • [ 6 ] [Liu Tao]Beijing Univ Technol, Educ Minist, Key Lab Optoelect Technol, Coll Elect Informat & Control Engn, Beijing 100022, Peoples R China

通讯作者信息:

  • [Li Jian-Jun]Beijing Univ Technol, Educ Minist, Key Lab Optoelect Technol, Coll Elect Informat & Control Engn, Beijing 100022, Peoples R China

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来源 :

ACTA PHYSICA SINICA

ISSN: 1000-3290

年份: 2013

期: 2

卷: 62

1 . 0 0 0

JCR@2022

ESI学科: PHYSICS;

ESI高被引阀值:162

JCR分区:3

中科院分区:4

被引次数:

WoS核心集被引频次: 2

SCOPUS被引频次: 2

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

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