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作者:

Jie, S. (Jie, S..)

收录:

EI Scopus SCIE

摘要:

A resist (ma-N 2403 and ZEP 520A7)-based convenient technology to fabricate air bridges on arbitrary substrate is proposed. It involves only two steps of electron-beam lithography. By changing the exposure dose during lithography, the resist can be cross-linked to different extent, and the permanently cross-linked polymer is used for piers. An evaporated 205-nm-thick Ti/Au thin film is used to construct the bridges. Typically, the air bridge is more than 18 mu m long, 2 mu m high, and 5 mu m wide. Due to the accumulated strain in the metal, it naturally forms an arch bridge, rendering no need for critical point drying. The adhesion between the metal and the polymer is considerably strong, even surviving mild sonication. This letter should contribute to a facile technology for manufacturing air bridges for various applications in microelectromechanical systems. [2012-0101]

关键词:

Air bridge cross-linking microelectromechanical systems (MEMS) microfabrication resist

作者机构:

  • [ 1 ] Beijing Univ Technol, Coll Elect Informat & Control Engn, Key Lab Optoelect Technol, Beijing 100124, Peoples R China

通讯作者信息:

  • [Jie, S.]Beijing Univ Technol, Coll Elect Informat & Control Engn, Key Lab Optoelect Technol, Beijing 100124, Peoples R China

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来源 :

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

ISSN: 1057-7157

年份: 2012

期: 6

卷: 21

页码: 1285-1287

2 . 7 0 0

JCR@2022

ESI学科: ENGINEERING;

ESI高被引阀值:138

JCR分区:1

中科院分区:2

被引次数:

WoS核心集被引频次: 1

SCOPUS被引频次: 1

ESI高被引论文在榜: 0 展开所有

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