Layered　LiNi1/3Co1/3Mn1/3O2　thin　film　electrodes　are　successfully　prepared　by　pulsed　laser　deposition　technique　and　post-annealed.　The　microstructure　of　the　thin　films　is　characterized　by　X-ray　diffraction,　field　emission　scanning　electron　microscopy,　X-ray　photoelectron　spectroscopy　and　transmission　electron　microscopy.　The　electrochemical　performance　of　the　thin　film　electrodes　is　evaluated　by　cyclic　voltammetry　and　galvanostatic　charge-discharge　measurements.　The　kinetics　of　Li　diffusion　in　the　thin　film　electrodes　are　investigated　by　galvanostatic　intermittent　titration　technique.　The　annealed　thin　films　exhibit　a　partially　amorphous　structure.　The　electrochemical　performance　of　LiNi1/3Co1/3Mn1/3O2　thin　film　electrodes　depends　on　the　annealing　temperature,　composition　and　thickness.　The　thin　film　electrodes　deposited　for　30　min　with　the　annealing　temperature　of　450　degrees　C　deliver　the　best　electrochemical　performance,　including　high　capacities,　good　cycle　performance　and　rate　capability.　The　initial　discharge　capacity　of　the　thin　film　electrodes　is　177　mAh　g(-1)　measured　at　a　rate　of　0.1C　in　the　voltage　range　of　2.8　-4.5　V.　The　capacity　retention　ratio　is　92%　after　25　cycles　at　0.5C　rate.　The　chemical　diffusion　coefficients　of　lithium　ion　in　the　thin　film　electrodes　are　in　the　range　of　10(-9)-10-(10)　cm(2)　s(-1).　(C)　2012　Elsevier　B.V.　All　rights　reserved.