Crystallization process of in situ annealed Ge2Sb2Te5 films - 文章详情页

作者：

Zhang, Lei (Zhang, Lei.) | Han, Xiaodong (Han, Xiaodong.) (学者：韩晓东) | Zhang, Ze (Zhang, Ze.)

收录：

EI Scopus SCIE

摘要：

Electron-diffraction　radial　distribution　function　(RDF)　was　used　as　a　structural　probe　to　study　the　process　of　crystallization　of　Ge2Sb2Te5　(GST)　films　annealed　in　situ.　The　GST　thin　film　began　to　crystallize　after　a　characteristic　peak　of　0.52　nm　appeared　in　the　RDF,　indicating　the　formation　of　third　nearest　neighbour　ordering.　The　GST　films　preferentially　form　uniform　nanosized　grains.　The　similarities　and　differences　in　the　structures　of　the　amorphous　phases　and　the　polycrystalline　phases　are　described.　(C)　2012　Elsevier　B.V.　All　rights　reserved.

关键词：

Crystallization Data storage materials In situ annealing Radial distribution function Thin films Transmission electron microscopy

作者机构：

[ 1 ] [Zhang, Lei]Beijing Univ Technol, Inst Microstruct & Property Adv Mat, Beijing 100124, Peoples R China
[ 2 ] [Han, Xiaodong]Beijing Univ Technol, Inst Microstruct & Property Adv Mat, Beijing 100124, Peoples R China
[ 3 ] [Zhang, Ze]Zhejiang Univ, Dept Mat, Hangzhou 310008, Zhejiang, Peoples R China

通讯作者信息：

韩晓东
[Han, Xiaodong]Beijing Univ Technol, Inst Microstruct & Property Adv Mat, Beijing 100124, Peoples R China

电子邮件地址：

xdhan@bjut.edu.cn |
zezhang@zju.edu.cn

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