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Electron-diffraction radial distribution function (RDF) was used as a structural probe to study the process of crystallization of Ge2Sb2Te5 (GST) films annealed in situ. The GST thin film began to crystallize after a characteristic peak of 0.52 nm appeared in the RDF, indicating the formation of third nearest neighbour ordering. The GST films preferentially form uniform nanosized grains. The similarities and differences in the structures of the amorphous phases and the polycrystalline phases are described. (C) 2012 Elsevier B.V. All rights reserved.
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JOURNAL OF ALLOYS AND COMPOUNDS
ISSN: 0925-8388
年份: 2012
卷: 537
页码: 71-75
6 . 2 0 0
JCR@2022
ESI学科: MATERIALS SCIENCE;
JCR分区:1
中科院分区:1
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