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作者:

Chen, Xiaochuan (Chen, Xiaochuan.) | Ji, Lingfei (Ji, Lingfei.) (学者:季凌飞) | Bao, Yong (Bao, Yong.) | Jiang, Yijian (Jiang, Yijian.) (学者:蒋毅坚)

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EI Scopus SCIE

摘要:

We studied the microstructure characteristics and solidification behaviour of the recast layer on a 1 mm Al2O3 electronic ceramic substrate processed by CO2 laser cutting to improve the cutting quality. SEM (scanning electron microscope) and CLSM (confocal laser scanning microscope) observations showed that the upper and lower regions of the recast layer consist of equiaxed grains, while columnar grains dominate in the middle region, downgrading cutting quality. We used finite element modelling (FEM) to understand the solidification mechanism and explain profile and microstructure variation along the kerf. Using this analysis, we performed experiments to study the influences of assist gas pressure and laser cutting speed on the grain size and recast layer thickness. A thin, dense recast layer of uniform thickness and microstructure resulted from the following optimal parameters: 8 bar N-2 assist gas pressure, cutting speed of 1500 mm/min, and laser fluence of 200W. (C) 2012 Elsevier Ltd. All rights reserved.

关键词:

Al2O3 Grain size Laser cutting Substrates Thermal conductivity

作者机构:

  • [ 1 ] [Chen, Xiaochuan]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 2 ] [Ji, Lingfei]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 3 ] [Bao, Yong]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 4 ] [Jiang, Yijian]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China

通讯作者信息:

  • 季凌飞

    [Ji, Lingfei]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China

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来源 :

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY

ISSN: 0955-2219

年份: 2012

期: 10

卷: 32

页码: 2203-2211

5 . 7 0 0

JCR@2022

ESI学科: MATERIALS SCIENCE;

ESI高被引阀值:294

JCR分区:1

中科院分区:1

被引次数:

WoS核心集被引频次: 16

SCOPUS被引频次: 17

ESI高被引论文在榜: 0 展开所有

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