Microstructures　fabricated　on　the　surface　of　solar　glass　have　the　potential　to　improve　the　performance　of　solar　cells.　In　this　paper,　in　order　to　overcome　the　high　transmittance　to　1064　nm　center　wavelength　fiber　laser　irradiation　and　realize　high　efficiency　process　on　transparent　glass　substrates,　different　absorber　materials,　including　alumina　powder,　alumina　ceramic　wafers,　and　copper　sulphate　solutions,　were　applied　for　dry　and　wet　etching　under　the　irradiation　of　1064　nm　pulsed　fiber　laser　respectively.　The　laser　fluence　was　varied　from　7　to　10　J/cm(2)　with　a　pulse　repetition　rate　of　20　kHz.　The　morphology　of　trenches　etched　by　means　of　laser　induced　backside　dry　etching　(LIBDE)　and　by　laser　induced　backside　wet　etching　was　measured　using　a　scanning　electronic　scope,　and　compared　from　the　aspects　of　etch　depth　and　width,　as　well　as　the　roughness.　On　the　basis　of　this　comparison,　a　higher　etch　rate　can　easily　be　obtained　by　dry　etching,　while　lower　roughness　is　a　feature　of　wet　etching.　The　mechanism　of　LIBDE　of　solar　glass　was　investigated　by　demonstrating　the　procedure　of　dry　etching　using　alumina　ceramic　wafer.　Moreover,　the　etch　threshold　fluence　was　estimated　to　be　7.47　J/cm2　by　extrapolation.　Both　types　of　laser　induced　backside　etching　techniques,　wet　and　dry,　show　the　evidence　of　effective　microprocessing　on　solar　glass.　(C)　2012　Laser　Institute　of　America.