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摘要:
The local thermal conductivity of polycrystalline aluminum nitride (AlN) ceramics is measured and imaged by using a scanning thermal microscope (SThM) and complementary scanning electron microscope (SEM) based techniques at room temperature. The quantitative thermal conductivity for the AlN sample is gained by using a SThM with a spatial resolution of sub-micrometer scale through using the 3 omega. method. A thermal conductivity of 308 W/m.K within grains corresponding to that of high-purity single crystal AlN is obtained. The slight differences in thermal conduction between the adjacent grains are found to result from crystallographic misorientations, as demonstrated in the electron backscattered diffraction. A much lower thermal conductivity at the grain boundary is due to impurities and defects enriched in these sites, as indicated by energy dispersive X-ray spectroscopy.
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来源 :
CHINESE PHYSICS B
ISSN: 1674-1056
年份: 2012
期: 1
卷: 21
1 . 7 0 0
JCR@2022
ESI学科: PHYSICS;
JCR分区:3
中科院分区:4