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A series of In2S3 thin films were obtained via chemical bath deposition method on the FTO glass in the acidic solution, with citric acid as the complexing agent. XRD, SEM, UV were adopted to characterize phase structure, morphology and optical transmission of the thin films. The results indicated that all the thin films were cube structured beta-In2S3, with uniform, network-like morphology. Transmission of films was step-down with the thickness of films increasing. Band gaps were calculated between 2.5 and 2.6 eV. The effect of concentration of the complexing agent on the thin films formation mechanism was investigated. The results showed that when the concentration of citric acid was lower, control step of the whole reaction system was the complexation balance of citric acid ions and metal indium ions, and when higher, the key reaction was that thioacetamide decomposed to form sulfide ion under acidic condition.
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