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摘要:
La2Zr2O7(LZO) buffer layer was prepared on the cube textured nickel alloy substrate with the nitrate as the precursor salts. Combine with the analysis of the thermal pyrolysis property of the precursor salts, and the study of epitaxial growth of LZO films on both of the LAO single crystal and the Ni5W alloy substrate, a optimized processing route is achieved, which is two step heating ways at low temperature together with the ramp heat treatment at high temperature. It is concluded that the pyrolysis process plays the most important role in the texture epitaxy. The orientation analyses reveal the formation of a cube texture, with the FWHM of (222) phi scan and the (400) omega scan of 8.5 degrees and 8.1 degrees, respectively. The SEM image shows the dense and homogeneous film without cracks and holes. The discussions above indicate that the nitrate route is feasible for the preparation of the LZO buffer layer.
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