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作者:

Huang, Huan (Huang, Huan.) | Zhang, Lei (Zhang, Lei.) | Wang, Yang (Wang, Yang.) | Han, Xiao Dong (Han, Xiao Dong.) (学者:韩晓东) | Wu, Yiqun (Wu, Yiqun.) | Zhang, Ze (Zhang, Ze.) | Gan, Fuxi (Gan, Fuxi.)

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EI Scopus SCIE

摘要:

The optical, dielectric, and structural characteristics of Si15Sb85 phase change memory thin films under a moving continuous-wave laser initialization are studied by using spectroscopic ellipsometry and high-resolution transmission electron microscopy. The dependence of complex refractive index, dielectric functions, absorption coefficient, and optical band gap of the films on its crystallization extents formed by the different initialization laser power are analyzed in detail. The structural change from as-deposited amorphous phase to distorted rhombohedra-Sb-like crystalline structure with the increase of initialization laser power is clearly observed with sub-nanometer resolution. The optical and dielectric constants, the relationship between them, and the local atomic arrangements of this new phase change material can help explain the phase change mechanism and design the practical phase change memory devices. (C) 2011 Elsevier B.V. All rights reserved.

关键词:

TEM SiSb phase change film Optical constant Dielectric function

作者机构:

  • [ 1 ] [Huang, Huan]Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab High Power Laser Mat, Shanghai 201800, Peoples R China
  • [ 2 ] [Wang, Yang]Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab High Power Laser Mat, Shanghai 201800, Peoples R China
  • [ 3 ] [Wu, Yiqun]Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab High Power Laser Mat, Shanghai 201800, Peoples R China
  • [ 4 ] [Gan, Fuxi]Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab High Power Laser Mat, Shanghai 201800, Peoples R China
  • [ 5 ] [Zhang, Lei]Beijing Univ Technol, Inst Microstruct & Property Adv Mat, Beijing 100124, Peoples R China
  • [ 6 ] [Han, Xiao Dong]Beijing Univ Technol, Inst Microstruct & Property Adv Mat, Beijing 100124, Peoples R China
  • [ 7 ] [Zhang, Ze]Beijing Univ Technol, Inst Microstruct & Property Adv Mat, Beijing 100124, Peoples R China
  • [ 8 ] [Zhang, Ze]Zhejiang Univ, Dept Mat, Hangzhou 310008, Zhejiang, Peoples R China

通讯作者信息:

  • [Wang, Yang]Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab High Power Laser Mat, Shanghai 201800, Peoples R China

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来源 :

JOURNAL OF ALLOYS AND COMPOUNDS

ISSN: 0925-8388

年份: 2011

期: 16

卷: 509

页码: 5050-5054

6 . 2 0 0

JCR@2022

ESI学科: MATERIALS SCIENCE;

JCR分区:1

中科院分区:1

被引次数:

WoS核心集被引频次: 12

SCOPUS被引频次: 13

ESI高被引论文在榜: 0 展开所有

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